Wafer level classification and standard (150×150)

First, excellent products (I type film)

1, physical and chemical properties

1 model: P crystal orientation <100>±1°;

2 Oxygen content: ≤1.0×1018at/cm3;

3 carbon content: ≤5×1016at/cm3;

4 Low lifetime: τ = 1.3-3.0μs (data for die under test voltage ≥ 20mv);

5 Resistivity: 0.9-1.2, 1.2-3.0, 3.0-6.0Ω•cm;

6 dislocation density: ≤3000/cm2;

2, the geometric size

1 side length: 125×125±0.5mm;

2 diagonal: 150×150±0.5mm;

3 Concentricity: The difference between the chord lengths of any two arcs is ≤ 1mm;

4 perpendicularity: the angle between any two sides is 90°±0.3°;

5th thickness: 200±20μm; (center point thickness ≥195μm, edge four-point thickness ≥180 μm)

180±20μm; (center point thickness ≥175μm, edge four-point thickness ≥160 μm)

6TTV: ≤ 30μm;

7 Curvature: ≤ 40μm;

3, surface indicators

1 line mark: no visible line marks;

2 visual surface: no stain, no water stains, stains, white spots, fingerprints, etc.;

3 No collapse, no visible cracks, smooth edges, no warping;

Second, qualified products (II type film)

1, physical and chemical properties

1 model: P crystal orientation <100>±1°;

2 Oxygen content: ≤1.0×1018at/cm3;

3 carbon content: ≤5×1016at/cm3;

4 Low lifetime: τ = 1.0-1.2μs (data for die under test voltage ≥ 20mv);

5 Resistivity: 0.5-0.8Ω•cm;

6 dislocation density: ≤3000/cm2;

2, the geometric size pv001 · net

1 side length: 125×125±0.5mm;

2 diagonal: 150×150±0.5mm;

3 Concentricity: The difference between the chord lengths of any two arcs is ≤ 1.5mm;

4 perpendicularity: the angle between any two sides is 90°±0.3°;

5th thickness: 200±20μm; (central thickness ≥195μm, four-point thickness ≥180 μm)

180±20μm; (center point thickness ≥175μm, edge four-point thickness ≥160 μm)

6TTV: ≤ 30μm;

7 Curvature: ≤ 40μm;

3, surface indicators

1 line mark: no obvious line marks, no touch sense of concave and convex.

2 Collapsing edge range: The collapsing edge is not "V" type, length × depth ≤ 1 × 0.5mm, number of ≤ 1 piece/piece; no visible crack, smooth edge, no warping;

Third, foreign products (III type film)

1, physical and chemical properties

1 model: PN crystal orientation <100>±3°;

2 Oxygen content: ≤1.0×1018at/cm3;

3 carbon content: ≤5×1016at/cm3;

4 minority life: τ <1.0μs (data on the die under test voltage ≥ 20m);

5 Resistivity: ≤0.5Ω•cm;

6 dislocation density: >3000/cm2;

2, the geometric size

1 side length: 125×125±1.0mm;

2 diagonal: 150×150±1.0mm;

3 Concentricity: The difference between the chord lengths of any two arcs is ≤ 1.5mm;

4 perpendicularity: the angle between any two sides is 90°±0.5°;

5 thickness: <160μm

3, surface indicators

1 There is a clear line mark, and the touch has a concave and convex feel.

Explanation: As long as it satisfies any one of the third "waiting for foreign goods (III type film)", it is judged to be unqualified.