21.7%! Micro-guided company's back passivation equipment helps photovoltaic cell conversion rate to re-innovate

At the beginning of the new year of 2017, Jiangsu Micro-guided Nano Equipment Technology Co., Ltd. specially designed for new high-efficiency solar cells, has completely independent intellectual property rights ALD atomic layer deposition film passivation technology came with exciting news. After four months of day and night fighting, the passivated battery received nearly 22% of the maximum conversion efficiency and 21.7% of the average conversion efficiency on the client. All other indicators have also created the world's highest level of this type of battery!

Jiangsu Weidiao Nano Equipment Technology Co., Ltd., a subsidiary of Wuxi Pioneer Group, is a young technology company committed to providing the latest and most reliable production equipment and solutions for high-tech industries at home and abroad. The atomic layer deposition technology developed specifically for the surface passivation of new high-efficiency solar cells has completed technical assessment, design verification, mechanical and process verification in less than one year until the final customer application evaluation is completed. The core of the work that supports this all from scratch is the strong technical team behind it. We have introduced Ph.D. teams from Finland and Singapore, plus doctoral and master's degrees from top universities such as China University of Science and Technology. Among them, several of them have obtained technical experts from the Jiangsu Double-Creation Talent Project, and are truly teams with high-tech industrialization experience.

The equipment developed for the passivation of solar cells on this occasion has undergone several rounds of technical research. The load of wafers in a single batch has reached an astonishing 1600 wafers while maintaining the uniformity of the film between the wafers and the wafers at 2%. Within the battery, the electrical performance is almost identical to the excellent performance. With an overall capacity of more than 4,000 wafers per hour, the cost of expensive chemical reaction sources can be effectively reduced, and the highly integrated automated loading and unloading ensures a fractional rate of less than 0.05%, which greatly reduces the actual cost of use. Its core ALD atomic layer deposition process can provide good passivation to the cell surface at film thickness as low as 2 nanometers. This is a condition that other technologies cannot be achieved in principle, and has reached the first international level in core technology. The leading level of the echelon.

Atomic layer deposition (ALD) technology is an emerging key technology with forward-looking and common characteristics in the field of nanotechnology and many other important industries. Existing ALD mass production technologies are monopolized by foreign equipment manufacturers such as ASM, AMAT, and TEL. Micro-guided ALD equipment product technology performance reached the international advanced level, breaking the monopoly of foreign countries, to fill the gaps in the country. At the same time, the successful research of ALD key technologies will promote the industrialization of many industrial fields including semiconductors, CMOS image sensors, LEDs, MEMS, displays, photovoltaics, and lithium-ion batteries. It is reported that micro-conductor company's "Atomic Layer Deposition (ALD) technology-based micro-nano device manufacturing key technology research and development" project has also been selected "2016 Jiangsu Province key R & D project (industry prospects and common key technologies) project".

Driven by the increasing demand for high-efficiency, low-cost crystalline silicon solar cells, Microguide provides high-performance ALD passivation and RIE dry texturing solutions for single- and polycrystalline high-efficiency solar cell technologies. Compared with traditional aluminum back-field batteries, micro-guided photovoltaic technology is applicable to the construction, transformation, and upgrading of a variety of high-efficiency crystalline silicon solar cell production lines, and can further increase solar cell conversion efficiency by more than 1%.

The combination of micro-guided RIE black silicon and ALD back passivation technology provides the best mass production solution for crystalline silicon solar cell efficiency breakthrough and cost reduction.