Vacuum pump classification

According to performance characteristics and uses classification (1) low vacuum pump The ultimate pressure is higher than 102Pa vacuum pump is a low vacuum pump. Common low vacuum pump reciprocating vacuum pump, rotary vacuum pump, liquid ring vacuum pump, jet vacuum pump and suction vacuum pump. (2) the vacuum pump in the vacuum pressure limit of 102 ~ 10-1Pa belongs to the vacuum pump. Common Roots vacuum pumps, multi-stage jet vacuum pumps, multi-stage rotary vacuum pumps and mechanical high-speed rotary vacuum pumps. (3) high vacuum pump The ultimate pressure of 10-1 ~ 10-5Pa vacuum pump is a high vacuum pump. Common high vacuum pumps have a variety of diffusion pumps and molecular pumps. (4) Ultra-high vacuum pump Vacuum pump with ultimate pressure lower than 10-5Pa belongs to ultra-high vacuum pump. Ultra-high vacuum pumps are various ion pumps, cryogenic pumps. According to the working principle and structural characteristics of classification (1) mechanical volumetric vacuum pump by mechanical movement of the pump chamber volume changes in the period to achieve the role of pumping is a mechanical volumetric vacuum pump. Belonging to such pumps are reciprocating vacuum pumps, rotary mechanical pumps (including rotary slice, screw type, Roots type, liquid ring, etc.). Such pumps in addition to mechanical booster pump, the general can be used alone. (2) jet vacuum pump There is no mechanical moving parts, mainly by the high-speed jet nozzle to vacuum is jet-type vacuum pump. Belonging to such pumps are steam jet pump, air jet pump, water jet pump and various diffusion pumps. Such pump structure is simple, reliable, long life, easy to repair, the application is more common.

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