New application of new generation femtosecond laser in ultra-fine cold processing

Processing system

Figure 1 is a schematic diagram of the optical path of a femtosecond laser micromachining system. The ultrashort pulsed laser beam output by the femtosecond laser can adjust the laser pulse energy through a half wave plate and a Glan prism; the stray light in the optical path is removed by the diaphragm to improve the beam quality; and the mechanical shutter is used to control the number of exposure pulses. The processing sample is placed on a three-dimensional numerical control precision moving table. The femtosecond laser beam is vertically irradiated on the surface of the sample after being reflected by the total reflection mirror and the microscope objective lens, and the movement of the sample is precisely controlled by the computer to complete the laser scanning processing. The ablation process of the femtosecond laser is observed in real time through a CCD connected to the microscopic eyepiece and can be photographed.

图1 飞秒激光微加工系统光路示意图
Figure 1 Schematic diagram of the optical path of the femtosecond laser micromachining system

Ultra-fine processing with femtosecond laser

Since the femtosecond laser began to be used for material processing, it has received great attention from scholars at home and abroad due to its unique processing advantages. Micron processing of glass, ceramics, diamonds, semiconductors, various polymers and metal materials has been widely carried out by femtosecond lasers.

(1) Punching: In 1996, Chichkov BN conducted a comparative test of perforating, picosecond, and nanosecond laser pulses on the steel sheet. The results showed that the metal surface processed by the femtosecond laser had no melting marks. The surrounding edges are smooth, clean and free of spatter, as shown in Figure 2.

图2 飞秒、皮秒、纳秒打孔对比
Figure 2 Femtosecond, picosecond, nanosecond punching comparison

In 2003, Barsch N et al. conducted a microfabrication study on the surface, surface, and groove of semiconductor materials by femtosecond lasers. Figure 3 shows micropores and micro-gears machined on a 500 μm thick silicon wafer using a femtosecond laser.

图3 飞秒激光在硅片上加工的微孔和微齿轮
Figure 3 Micropores and micro gears processed by a femtosecond laser on a silicon wafer

In order to reduce the size of the photomultiplier tube, German researchers have successfully fabricated a hexagonal screen structure of a photomultiplier tube on a 7 μm thick nickel foil using a femtosecond laser. The processed hexagonal screen has a minimum size of 10 to 20 μm. And can be processed on a larger diameter (12mm).

Clawfoot Bathtub

Clawfoot Bathtub

Clawfoot Bathtub

Guangzhou Aijingsi Sanitary Products Co.,Ltd , https://www.infinityedgehottub.com